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The full MEMS Journal archive — 74 articles across two decades of sensors, MEMS, and microtechnology.
Bonding reliability testing for wafer level packaged MEMS devices
by Michael Shillinger Vice President of Operations, Innovative Micro Technology Devices, especially MEMS that have moving actuators , perform best inside the cleanroom . When taken out of the cleanroom, particles can hinder or degrade the performance, and lead to device failure. IMT , like many others in the…
Tronics expands MEMS manufacturing facilities
Tronics , one of the leading international MEMS foundries , is expanding its headquarters and manufacturing facilities in Grenoble. After 14 years of operations, and several recent significant investments in the US, this is an important milestone in the growth of the company. Following several years of solid…
X-FAB releases IP design blocks for MEMS accelerometers
X-FAB Silicon Foundries this week added ready-to-use design IP blocks for acceleration sensors to its MEMS foundry service offerings. Developed in cooperation with MicroMountains Applications and HSG-IMIT , the new IP blocks can be incorporated into customer designs of MEMS capacitive accelerometers covering 2G,…
Silex, Philips partner on MEMS commercialization
MiPlaza , part of Philips Innovation Services, has entered into an agreement with Silex Microsystems , a MEMS foundry based in Sweden. According to the companies, the agreement will enable Philips to offer its customers a "seamless transfer" from concept to production of MEMS devices . At the same time, Silex will…
MEMS foundry IMT adds to its arsenal of hermetic wafer level packaging capabilities
IMT, a MEMS foundry with wafer level packaging capabilities, introduced its hermetic gold-to-gold (Au-Au) thermo compression bonding process this week. In development for nearly a year , this bond is repordedly now being used in production . According to the company, this type of bonding is one of the lowest cost…
MEMS foundry IMT adds to its arsenal of through silicon via offerings
Innovative Micro Technology (IMT) announced this week the addition of a new geometry point in its technology roadmap for through silicon vias ( TSVs ). Joining the copper-filled 15 by 60 micron depth TSV configuration that has been in production for nearly 2 years , IMT has been sampling its 50 by 250 micron…
Overview of wafer level packaging technology for MEMS applications
by Michael Shillinger Vice President of Operations, Innovative Micro Technology Wafer level packaging (WLP) technology offers protection of delicate MEMS structures from ambient environment , providing improved reliability, performance, and reduced cost benefits to meet real world requirements. In simple terms, WLP…
Lilliputian, Intel to partner on manufacturing
Lilliputian Systems, developer of a MEMS based portable power solution for consumer electronics devices, announced that it has signed a wafer manufacturing supply agreement with Intel. Additionally, Lilliputian announced that Intel Capital has taken an equity stake in Lilliputian Systems. "Intel recognizes that…
MEMS foundry Advanced MicroSensors to be acquired by Plures Technologies
Plures Technologies is in the final phase of acquiring and recapitalizing Advanced MicroSensors (AMS), an established high volume MEMS fabrication facility. AMS offers a complete suite of MEMS processing capabilities and specific expertise in the use of magnetic films for MEMS and other applications.
Overview of glass micro machining processes for MEMS applications
by Dave Sarvela Manager of Applied Technology, IKONICS Corporation Glass is often considered a more desirable material for particular MEMS device applications due to its unique properties, such as optical transparency and biological compatibility. As the desire to use glass in the MEMS industry increases, so does…
MEMS foundry DALSA to expand R&D investment
DALSA Corporation , a manufacturer of digital imaging, MEMS and semiconductor components, announced this week that it plans to invest $160 million in new research and development initiatives over the next five years, supported by a grant of up to $24.3 million from the Ontario provincial government.
MEMS foundry ISSYS announces manufacturing expansion
Integrated Sensing Systems, Inc. (ISSYS) announced that it has completed its 2010 manufacturing expansion project, adding 5,400 square feet to its existing facility. The expansion is dedicated to manufacturing of system-level products based on ISSYS MEMS chips that are fabricated in its current cleanroom facility.…
Groups partner on TSV process development for 3D MEMS and IC integration
EV Group (EVG), a supplier of wafer bonding equipment for the MEMS, nanotechnology and semiconductor markets, and the Institute of Microelectronics (IME), a research institute of the Agency for Science, Technology and Research ( A*STAR ), announced that they have entered into a two-year cooperation agreement to…
IMEC crafts SiGe MEMS foundry
by R. Colin Johnson Contributing Editor, MEMS Investor Journal IMEC, Europe's largest independent research center in MEMS and nanotechnology, is offering a monolithically integrated silicon-germanium (SiGe) MEMS process as a foundry service. IMEC’s new MEMS fabrication capability extends its more-than-CMOS (CMORE)…
Baolab emerges as a CMOS MEMS player
As the industry is pushing for further integration of CMOS and MEMS chips, a startup company Baolab claims that it has developed a process with which a variety of MEMS devices can be made on standard CMOS lines . We recently spoke with David Doyle , the company’s CEO, about the process’ advantages and limitations…
Overview of TSV process options
There is an increasingly expanding interest in through-wafer via (TWV) and through-silicon via (TSV) technologies. In this comprehensive interview , we discuss TWV and TSV process options with Chris Gudeman , VP Process Development at Innovative Micro Technology. Dr. Gudeman comments on material and process…
APM ships MEMS pressure sensor elements to automotive industry
Asia Pacific Microsystems announced that it has shipped over 2 million MEMS pressure sensor elements to a leading global automotive electronic company. APM provides MEMS foundry services for the piezoresistive sensor elements which are key components for the pressure sensor business. With this customer, the first…
MEMS in Europe: A perspective from TRONIC'S Microsystems
TRONIC'S Microsystems was founded in 1997 as a spin-off from LETI. The company has enjoyed impressive growth and is one of the leading MEMS foundries in the world. We recently spoke with TRONIC'S CEO Peter Pfluger about the interesting start ups they are seeing in Europe, the new Minatec MEMS and nanotechnology…
Interview with IMT’s CEO John Foster
Based in Santa Barbara, Innovative Micro Technology (IMT) is one of the leading MEMS foundries. We recently spoke with John Foster , the CEO of the company. In the interview, he talks about his company’s recent projects as well as some general trends in the MEMS industry .
Micralyne builds on success in the Asian market
(Press Release) -- Micralyne Inc. , a world-leading manufacturer of MEMS based industrial components, reports success penetrating the emerging MEMS market in Asia. Building on its position as one of the largest independent MEMS foundries in North America , Micralyne has successfully extended its reach to Asia by…
Optimizing MEMS Manufacturing
Tight control of manufacturing flows and yield is one of the essential factors for success with MEMS manufacturers. We recently spoke with Dan Estrada , Vice President of Eyelit, whose company provides software systems to help manufacturers achieve greater fabrication efficiencies and profitability. Eyelit already…
MEMS at Freescale
We recently spoke with Dave Monk , Freescale's Silicon Technology and Microsystems manager.
Micralyne CEO on MEMS
Micralyne is a manufacturer of microfabricated and MEMS-based products which include sensors, lab-on-a-chip devices, and optical switch systems. We spoke with Chris Lumb , the CEO of Micralyne.
Microfabrica's 3-D MEMS
Microfabrica (previously MEMGen) is a MEMS start up that secured $15 million in venture financing last year. We recently spoke with Adam Cohen , the EVP of Technology and CTO of the company.