MOEMS · August 5, 2010

MEMS enabled micro mirrors provide platform for single chip cameras

by John Williamson Contributing Editor, MEMS Investor Journal Belgium-based research center imec’s NVision machine-vision program provides a new platform that replaces separate camera lenses with MEMS enabled micro mirrors on a single chip . “We set out to make a zoom lens system for digital single lens reflex (…

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by John Williamson
Contributing Editor, MEMS Investor Journal

100805imeclens1 Belgium-based research center imec’s NVision machine-vision program provides a new platform that replaces separate camera lenses with MEMS enabled micro mirrors on a single chip.  “We set out to make a zoom lens system for digital single lens reflex (DSLR) cameras based on micro mirrors, providing full electronic control without mechanical movements.  Our goal is a camera half the size but with twice the zoom range of conventional DSLR cameras, and with no sacrifice in quality,” according to Dr. Francesco Pessolano, the NVision program manager at imec.

Dr. Pessolano expects the one-chip smart cameras to find application in a broad range of consumer and industrial photo and video products.  “Examples mentioned at a technology forum we hosted in June include light field imaging, stereo cameras, various types of scanners and high-speed cameras,” he said.

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A conventional DSLR camera lens configuration showing multi-lens components (upper left) and the imec smart lens showing the micro mirror components (bottom right).

Imec will not be manufacturing the smart cameras but instead will provide the technology platform to companies developing products on a commercial scale.

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A conventional DSLR camera lens (left) and the imec smart lens (right) showing comparative size.

“Our main challenge is finding the means to give precise control over positioning each individual micro mirror over a relatively large tilting angle that can be continuously changed,” says Dr. Pessolano.  “In this development we aim for an improvement on imec’s silicon-germanium MEMS technology, which is based on a MEMS-last approach.  In this case, the CMOS-integrated micro mirrors are processed after and on top of the CMOS circuits.  The result is 11-megapixel Si-Ge micro mirror arrays on CMOS wafers.  The 8 μm × 8 μm pixels can be individually addressed by analog inputs to enable accurate tilt angle modulation.”

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Polar micro mirror array used in an imec smart lens.

Weight and bulk vary depending on the models available in conventional DSLR cameras, but can be as large as 6kg (~13 pounds) and 550 mm (~21 inches) or even more in terms of physical space and zoom, according to imec.  “By incorporating imec smart lenses weight could drop to less than 100 grams (3.5 ounces) in a package less than 100 x 126mm (~ 4 x 5 inches) in size,” Dr. Pessolano says.  “While cost factors will be determined by manufacturers, they offer the promise of being much less expensive than DSLR models.  Other benefits of smart lenses include fast and full electronic control, the ability to capture panoramic views and a using a single lens for exposures from macro to normal to telescopic zooms.”

Copyright 2010 MEMS Investor Journal, Inc.